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The goal of this work is to introduce an advanced titania-based multivariate microelectromechanical systems (MEMS) technology gas sensor. The project’s approach is to use oxidation-resistant substrates such as Ti, Al, and Cr alloys to produce arrays of doped nano-structured TiO2 MEMS gas sensors and combine these on a single platform. A single-platform, multi-sensor system enables us to accurately detect multiple gases simultaneously, including O2, H2, CO2 and NOX. The sensor is designed to be effective in harsh, multi-gas environments at temperatures and pressures ranging from 20 °C to 1200 °C and 15 to 1000 psi.
The primary application of the proposed sensor will be to monitor emitted combustion gases for coal power generation plants, gas turbines, and gasifiers. The value incentive for end users is to accurately monitor gas concentrations to improve system efficiency, minimize wear on equipment, and produce accurate emissions reports for regulatory purposes.
