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Oil & Natural Gas Technology DOE Award No.: DE-FC26-06NT42241 Final Report A Robust MEMS Based Multi-Component Sensor For 3D Borehole Seismic Arrays Submitted by: Paulsson Geophysical Services, Inc. 1215 W Lambert Rd. Brea, CA 92821 Prepared for: United States Department of Energy National Energy Technology Laboratory July 30, 2007